20.500.12556/DKUM-46054 Gradnja 3D mikrostruktur Building of 3D microstructures Nanorobotika kot ena izmed tehnik mladega in še dokaj neraziskanega področja zajema premikanje in gradnjo 3D-mikrostruktur s tako imenovanim postopkom ‘’pick and place’’. Sam postopek poteka s premikanjem zlate konice znotraj vakuumske komore, kjer se nahajajo objekti za sestavo mikrostrukture. Pri tem so v veliko pomoč tudi van der Waalsove sile, ki se ustvarijo med objekti in samo gradnjo deloma tudi olajšajo. V diplomskem delu je gradnja 3D-mikrostruktur prikazana preko dokazovanja, ali se v vakuumski komori pri tlaku okoli 150 µbar res lahko sestavi objekt iz silicijeve osi s približnim premerom 10 µm ter zobnika, katerega luknja za osovino je premera približno 10 µm, pri čemer sta uporabljena dva načina, in sicer vstavljanje osi v zobnik in natikanje zobnika na samo os. Nanorobotics is a technique, within young and relatively unexplored area, which includes moving and construction of 3D microstructures with a process ''pick and place''. The process ''pick and place'' involves moving of the golden robot finger’s tip in the vacuum chamber, where are objects for construction of 3D microstructures. In doing so, there are used van der Waals forces, which attract micro objects between themselves to allow construct the microstructure. In thesis, I would like to prove, that in a vacuum chamber at a pressure of about 150 μbar can be possible to construct a 3D microstructure of silicon axis with an approximate diameter of 10 μm and a sprocket, which hole for axis has a diameter of about 10 μm. This I will attempt to prove on two ways, with inserting silicon axis in the sprocket and with attaching the sprocket on the silicon axis. nanorobotika van der Waalsova sila mikrostrukture nanorobotic van der Waals forces microstructures true true false [B. Namar] Slovenski jezik Angleški jezik Diplomsko delo/naloga 2014-09-11 08:38:40 2014-11-21 12:07:49 2022-05-17 03:10:07 2021-05-04 03:31:49 2014 0 Maribor 0 0000-00-00 NiDoloceno NiDoloceno NiDoloceno 0000-00-00 0000-00-00 0000-00-00 007.52:620.3(043.2) 18488598 URN:SI:UM:DK:FUGQLABU VS_Namar_Bostjan_2014.pdf VS_Namar_Bostjan_2014.pdf 1 F09B400CA5BA3FBAEBFDB57233A92861 b447a2bacf7bd4193aa637d422cde25e0eec52b8910291e2177808d95d15ecaf 3616902a-7c0b-11eb-bb7a-00155d0001ca https://dk.um.si/Dokument.php?lang=slv&id=67069 Fakulteta za strojništvo 0 0 0