20.500.12556/DKUM-96930 Enhancing calibration accuracy with laser interferometry for high-resolution measuring systems This paper presents an analysis of the measurement capability of laser interferometry for calibrating high-resolution measuring systems, focusing on potential errors that need to be carefully controlled to ensure adequate metrological traceability. The primary scientific research focus of our National Dimensional Metrology Laboratory is the development of metrological applications for industry, with ongoing improvements in calibration procedures for measuring machines and tools. Through a review of possible error sources, an innovative approach to reducing the most significant factors is proposed. This is specifically applied to the following calibration cases: field calibration of coordinate measuring machines, and laboratory calibration of precision probes and line scales. Instrumental and environmental errors can be effectively mitigated by using periodically calibrated laser interferometers in well-controlled air conditions, ensuring an uncertainty of 0.2 μm/m. Most geometrical errors can be minimized by precise adjustments to the interferometry and positioning systems, achieving an uncertainty of 0.3 μm/m. However, errors caused by temperature differences in the material along the measuring path remain the most influential. These arise due to the high expansion coefficient of the material and some uncertainty in its properties. After several hours of temperature stabilization, using three temperature sensors along the displacement range for software compensation, temperature differences still contribute significantly to measurement uncertainty. For example, the error is 0.5 μm/min in the case of line scale calibration and 1.1 μm/m for coordinate measuring machine calibration. laser interferometry high resolution measurements measurement uncertainty dimensional metrology coordinate measuring machine precise probe line scale laserska interferometrija meritve visoke ločljivosti merilna negotovost dimenzijsko meroslovje koordinatni merilni stroj natančna sonda črtno merilo true false true Chair of Production Engineering (CPE), University of Maribor Faculty of Mechanical Engineering Angleški jezik Slovenski jezik https://apem-journal.org/ Content from this work may be used under the terms of the Creative Commons Attribution 4.0 International Licence (CC BY 4.0). Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. Članek v reviji 2026-02-03 09:04:01 2026-02-03 09:04:02 2026-02-04 03:11:25 0000-00-00 00:00:00 2024 0 0 str. 386-394 no. 3 Vol. 19 Sept. 2024 0000-00-00 Zaloznikova Objavljeno NiDoloceno 2024-07-24 2024-10-28 2024-10-31 006.915 220036867 10.14743/apem2024.3.514 1854-6250 APEM19-3_386-394.pdf APEM19-3_386-394.pdf 1 64073FCA1DB4AB0CBE53740778F4E0BB 88b442cb1ae653d6bda93a301bfbbe917800dbfc29674d9090cee7e47f24af1b 95a49974-00d7-11f1-bf34-00155d581219 https://dk.um.si/Dokument.php?lang=slv&id=203009 https://apem-journal.org/Archives/2024/Abstract-APEM19-3_386-394.html 0 9a26a279-00d7-11f1-bf34-00155d581219 https://dk.um.si/Dokument.php?lang=slv&id=203010 Fakulteta za strojništvo Advances in production engineering & management 0 0 0