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Title:Raziskovanje parametrov kapacitivno vezane plazme : diplomsko delo univerzitetnega študijskega programa
Authors:ID Popović, Zoran (Author)
ID Tovornik, Boris (Mentor) More about this mentor... New window
ID Muškinja, Nenad (Comentor)
Files: This document has no files. This document may have a physical copy in the library of the organization, check the status via COBISS. Link is opened in a new window
Language:Slovenian
Work type:Undergraduate thesis
Organization:FERI - Faculty of Electrical Engineering and Computer Science
Keywords:plazemska tehnologija, plazma, kapacitivno vezana plazma, plastenje, električni parametri plazme, avtomatizacija procesov, krmiljenje, vakuumska tehnologija
Place of publishing:Maribor
Publisher:[Z. Popović]
Year of publishing:2005
PID:20.500.12556/DKUM-873 New window
UDC:681.51:533.9(043.2)
COBISS.SI-ID:9715478 New window
NUK URN:URN:SI:UM:DK:JM9RRNQR
Publication date in DKUM:26.07.2007
Views:2559
Downloads:0
Metadata:XML DC-XML DC-RDF
Categories:KTFMB - FERI
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Secondary language

Language:English
Keywords:plasma, capacitive coupled plasma, process control, DLC-coating, vacuum technology


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