| Title: | Enhancing calibration accuracy with laser interferometry for high-resolution measuring systems |
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| Authors: | ID Črepinšek-Lipuš, Lucija (Author)
ID Ačko, Bojan (Author)
ID Klobučar, Rok (Author) |
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| Files: |  APEM19-3_386-394.pdf (1,32 MB)
MD5: 64073FCA1DB4AB0CBE53740778F4E0BB
 https://apem-journal.org/Archives/2024/Abstract-APEM19-3_386-394.html
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| Language: | English |
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| Work type: | Article |
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| Typology: | 1.01 - Original Scientific Article |
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| Organization: | FS - Faculty of Mechanical Engineering
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| Abstract: | This paper presents an analysis of the measurement capability of laser interferometry for calibrating high-resolution measuring systems, focusing on potential errors that need to be carefully controlled to ensure adequate metrological traceability. The primary scientific research focus of our National Dimensional Metrology Laboratory is the development of metrological applications for industry, with ongoing improvements in calibration procedures for measuring machines and tools. Through a review of possible error sources, an innovative approach to reducing the most significant factors is proposed. This is specifically applied to the following calibration cases: field calibration of coordinate measuring machines, and laboratory calibration of precision probes and line scales. Instrumental and environmental errors can be effectively mitigated by using periodically calibrated laser interferometers in well-controlled air conditions, ensuring an uncertainty of 0.2 μm/m. Most geometrical errors can be minimized by precise adjustments to the interferometry and positioning systems, achieving an uncertainty of 0.3 μm/m. However, errors caused by temperature differences in the material along the measuring path remain the most influential. These arise due to the high expansion coefficient of the material and some uncertainty in its properties. After several hours of temperature stabilization, using three temperature sensors along the displacement range for software compensation, temperature differences still contribute significantly to measurement uncertainty. For example, the error is 0.5 μm/min in the case of line scale calibration and 1.1 μm/m for coordinate measuring machine calibration. |
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| Keywords: | laser interferometry, high resolution measurements, measurement uncertainty, dimensional metrology, coordinate measuring machine, precise probe, line scale |
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| Publication status: | Published |
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| Publication version: | Version of Record |
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| Submitted for review: | 24.07.2024 |
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| Article acceptance date: | 28.10.2024 |
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| Publication date: | 31.10.2024 |
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| Publisher: | Chair of Production Engineering (CPE), University of Maribor Faculty of Mechanical Engineering |
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| Year of publishing: | 2024 |
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| Number of pages: | str. 386-394 |
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| Numbering: | Vol. 19, no. 3 |
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| PID: | 20.500.12556/DKUM-96930  |
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| UDC: | 006.915 |
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| ISSN on article: | 1854-6250 |
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| COBISS.SI-ID: | 220036867 |
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| DOI: | 10.14743/apem2024.3.514 |
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| Copyright: | Content from this work may be used under the terms of the Creative Commons Attribution 4.0 International Licence (CC BY 4.0). Any further distribution of this work must maintain attribution to the author(s) and the title of the work, journal citation and DOI. |
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| Publication date in DKUM: | 03.02.2026 |
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| Views: | 203 |
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| Downloads: | 66 |
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| Metadata: |    |
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| Categories: | Misc.
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